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| Date : 2010/07/23, Hit : 860 |
50th Anniversary Memorial Symposium after Laser Invention「Lasers in Semiconductor Industry」
Date：October 15, 2010 13:00 p.m. – 17:00 p.m.
Venue：Fukuoka Institute of Technology, Fukuoka 811-0295
Sponsored by Laser Society of Japan
Technical cooperation with Fukuoka Institute of Technology,
Program
13：00 Opening
Head of Kyushu Branch of Laser Society of Japan Tatsuo Okada
13：00～13：10 Opening Remarks
President of Laser Society of Japan Sadao Nakai
13：10～13：50 Keynote Talk Semiconductor Industry in Kyushu
METI Kyushu Office Shoichi Matsutani
13：50～14：20 Present Status and Trend in Light Source Development for Optical Lithography
Gigaphoton Co. Ltd. Hakaru Mizoguchi
14：20～14：50 Perfect Dry Dicing Process of Semiconductor
Hamamatsu Photonics Co. Ltd. Naomi Uchiyama
14：50～15：20 Coffee Break
15：20～15：50 Applications of Lasers in Industry and Their Prospect Mitsubishi Heavy Industry Co. Ltd. Kouhei Kawazoe
15：50～16：20 Laser Micro-Machining of Functional Thin Films and Its Application in Manufacturing Takei Electric Co. Ltd. Tarou Kuwahara
16：20～17：00 Special Invited Lecture Present Status and Trend of Laser Processing in Semiconductor Manufacturing of Korea, Korea Institute of Machinery & Materials Sung-Hak CHO
17：00 Closing
Fukuoka Institute of Technology Yoshiyuki Kawamura
17:15 Mutual Exchange Reception
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