Date : 2009/08/29, Hit : 1015
Á¦¸ñ    ÃÊû°­¿¬ ÃÊ´ë : CLEO/PR 09
ÀÛ¼ºÀÚ   S.H.Cho
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±¹Á¦ ·¹ÀÌÀú ÇÐȸ CLEO/PR 09 ¿¡¼­ ÆèÅäÃÊ·¹ÀÌÀú ÇÁ·Î¼¼½ÌºÐ°ú ÃÊû°­¿¬·Î ÃʺùµÇ¾î °­¿¬¿¹Á¤

ÇÐȸ¸í: CLEO/PR 09
The 8th Pacific Rim Conference on Lasers and Electro-Optics (CLEO¢ç/Pacific Rim 2009)

ÀϽÃ: 2009.8.31
Àå¼Ò: Áß±¹ »óÇÏÀÌ ±¹Á¦ÄÁº¥¼Ç¼¾ÅÍ
ºÐ°ú: ÆèÅäÃÊ·¹ÀÌÀú ¹Ì¼¼ ÇÁ·Î¼¼½ÌºÐ°ú
Á¦¸ñ: Removal of nano particles on silicon wafer by self-channeled plasma filament
°­»ç¸í : Sung-Hak CHO, Jung-Kyu Park, Won-Seok Chang,
Jae-Goo Kim, and Kyung-Hyun Whang

ȨÆäÀÌÁö: http://www.siom.cn/cleo/index.asp



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