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| Date : 2009/08/29, Hit : 1015 |
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ÃÊû°¿¬ ÃÊ´ë : CLEO/PR 09 |
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S.H.Cho |
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±¹Á¦ ·¹ÀÌÀú ÇÐȸ CLEO/PR 09 ¿¡¼ ÆèÅäÃÊ·¹ÀÌÀú ÇÁ·Î¼¼½ÌºÐ°ú ÃÊû°¿¬·Î ÃʺùµÇ¾î °¿¬¿¹Á¤
ÇÐȸ¸í: CLEO/PR 09
The 8th Pacific Rim Conference on Lasers and Electro-Optics (CLEO¢ç/Pacific Rim 2009)
ÀϽÃ: 2009.8.31
Àå¼Ò: Áß±¹ »óÇÏÀÌ ±¹Á¦ÄÁº¥¼Ç¼¾ÅÍ
ºÐ°ú: ÆèÅäÃÊ·¹ÀÌÀú ¹Ì¼¼ ÇÁ·Î¼¼½ÌºÐ°ú
Á¦¸ñ: Removal of nano particles on silicon wafer by self-channeled plasma filament
°»ç¸í : Sung-Hak CHO, Jung-Kyu Park, Won-Seok Chang,
Jae-Goo Kim, and Kyung-Hyun Whang
ȨÆäÀÌÁö: http://www.siom.cn/cleo/index.asp
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