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| Date : 2009/08/19, Hit : 2294 |
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세미나 : 세미나공지 (8/20)- 부산대 권세훈교수 Atomic Layer Deposition for nano-fabrication and novel hybrid functional materials |
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S.H.Cho |
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아래와 같이 세미나를 개최합니다.
관심 계신분 참석바람니다.
세미나명: Atomic Layer Deposition for nano-fabrication and novel hybrid functional materials
일시: 8월 20일(목) 오후 4시
장소: 연구6동 1층 세미나실
강사: 권세훈 교수 부산대 NCRC
초록: Abstract
Currently, atomic layer deposition (ALD) is considered as one of the most promising thin film deposition techniques for nanofabrication. The benefits of ALD include thickness control at the atomic scale, production of highly conformal films, low temperature growth, and wide-area uniformity. Due to these benefits, ALD has been adopted as a key technology for the semiconductor microelectronics industry to break beyond 45nm device node and is now finding ever more emerging applications. In addition, recent efforts revealed that the novel hybrid functional materials can be developed by careful control of ALD process.
In this presentation, we will discuss our results and emerging application areas where ALD has been recently utilized. Examples include the development of novel hybrid functional materials for high-k dielectrics, diffusion barrier, and high efficiency heating resistors. Also, hybrid nanofabrication techniques using ALD combined with low dimensional nanomaterials and biomaterials will be discussed.
고맙습니다.
나노공정 조성학드림
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Sung-Hak CHO Ph.D. / Principal Research Engineer
Nano Machining Lab.
KIMM (Korea Institute of Machinery & Materials)
171 Jang-dong, Yuseong-gu, Daejeon 305-343, Korea
Tel: +82-42-868-7077, Fax: +82-42-868-7149
E.mail: shcho@kimm.re.kr, H.P: 011-9839-3894
Lab URL: http://nanoprocess.kimm.re.kr/femto
KAIST 기계공학과 겸임교수, 부산대 NCRC 겸임교수
日本 理化學硏究所(RIKEN) Laser Tech. Lab.客員硏究員
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